Abrasives and Grinding Tools Industry Popular Science

Hot Wire Chemical Vapor Deposition

 

Hot filament chemical vapor deposition (HFCVD) is a process for preparing diamond films. Its main principle is to pass a mixture of carbon-containing gas and hydrogen into a reaction furnace chamber through low-pressure vapor deposition at high temperature, and decompose it into carbon-containing active groups and excited hydrogen atoms through a hot wire (tungsten wire or molybdenum wire) at high temperature, which are then deposited on the substrate to form a carbon film.(Abrasives and Grinding Tools Industry Popular Science)